High Resolution Scanning Electron Microscopy

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The Department offers a wide range of modern facilities for the evaluation of the microstructure. There is large experience available in the examination of spacecraft materials both, for the characterisation of the microstructure and for failure investigations by correlation to macroscopic properties. Numerous ceramic, metallic and organic spacecraft materials were investigated.

HRSEM: Zeiss Gemini Supra VP

SEM Examinations can be performed with a Zeiss HRSEM Scanning Electron Microscope. HRSEM with unique GEMINI-field emission column has been developed for applications in the field of modern material science and technology and offers outstanding options for characterisation of complex structures up to nano scale. The Zeiss HRSEM is also equiped with EDAX and EDS/EBSD Detectors.

EBS/EBSD-System - Pegasus

The integrated system EDS/EBSD (Pegasus) enables the simultaneous collection of EDS (chemistry) and EBSD (crystallography) data, allowing direct correlation between the elemental content and microstructural aspects of the material being studied.

Features of Zeiss HRSEM:

• Highest resolution and excellent contrast at
  high voltage imaging: 1,0 nm at 15 kV
  low voltage imaging: 1,7 nm at 1 kV
  
  ultra low voltage imaging: 4.0 nm at 0,1 kV
• Wide range of magnification - 12 - 980 000x
• Variable pressure - mode (VP) allows examination of non-conducting specimens without preparation, 2 - 133 Pa, adjustable in steps of 1 Pa
• High current mode for analytical applications e.g EDX or EBSD, 4pA - 10 nA (20 nA optional )
• In-lens detectors permits high image quality especially at low beam voltage
• Low magnetic fields at specimen assures stable electron beam for magnetic materials
• Large specimen chamber allows investigation of large samples
• Fully motorized 5 axes eucentric specimen stage gives firstly flexibility to handle large awkwardly shaped specimens and secondly possibility to relocate quickly the marked areas.

EDS ( Energy Dispersive Spectrum) Detector

The Sapphire Si(Li) LN (Liquid Nitrogen) Cooled EDS detector offers the highest peak to background ratio and the best resolution (@ Mn K) available. Following analysis can be performed by EDS;

• Detection of elements - including light elements begining by Be
• Determination of phase composition
• Line scans - element distribution along a line
• Mapping - elements distribution in defined area
• Quantitative analysis
• Particle phase analysis